Paper Title:
An Exploration on the Bridge Formation Mechanism of Cylindrical Storage Poly-Silicon by Water Marks in High Performance 4Gigabit DRAM Capacitor
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
15-18
DOI
10.4028/www.scientific.net/SSP.76-77.15
Citation
K. T. Lee, W. G. Shim , H. H. Ko, H. Y. Kim, Y. P. Han , S. R. Hah, J. T. Moon, "An Exploration on the Bridge Formation Mechanism of Cylindrical Storage Poly-Silicon by Water Marks in High Performance 4Gigabit DRAM Capacitor", Solid State Phenomena, Vols. 76-77, pp. 15-18, 2001
Online since
January 2001
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