An Exploration on the Bridge Formation Mechanism of Cylindrical Storage Poly-Silicon by Water Marks in High Performance 4Gigabit DRAM Capacitor |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
15-18 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.15 |
| Citation |
Kun Tack Lee et al., 2001, Solid State Phenomena, 76-77, 15 |
| Authors |
Kun Tack Lee, Woo Gwan Shim, Hyung Ho Ko, Ho Young Kim, Yong Pil Han, Sang Rok Hah, Joo Tae Moon |
| Keywords |
Capacitor, DRAMs, Water Marks |
| Full Paper |
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