Paper Title:
The Origins of Fluorine in Dry Ultrathin Silicon Oxides
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
153-156
DOI
10.4028/www.scientific.net/SSP.76-77.153
Citation
G. Vereecke, E. Röhr, R.J. Carter, T. Conard, H. De Witte, M. M. Heyns, "The Origins of Fluorine in Dry Ultrathin Silicon Oxides", Solid State Phenomena, Vols. 76-77, pp. 153-156, 2001
Online since
January 2001
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Price
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