Paper Title:
Structural and Electrical Characterization of Ultra-Thin SiO2 Films Prepared by Catalytic Oxidation Method
  Abstract

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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
157-160
DOI
10.4028/www.scientific.net/SSP.76-77.157
Citation
A. Izumi, M. Kudo, H. Matsumura, "Structural and Electrical Characterization of Ultra-Thin SiO2 Films Prepared by Catalytic Oxidation Method", Solid State Phenomena, Vols. 76-77, pp. 157-160, 2001
Online since
January 2001
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Price
$32.00
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