Structural and Electrical Characterization of Ultra-Thin SiO2 Films Prepared by Catalytic Oxidation Method |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces V |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 157-160 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.157 |
| Citation | Akira Izumi et al., 2001, Solid State Phenomena, 76-77, 157 |
| Authors | Akira Izumi, Manabu Kudo, Hideki Matsumura |
| Keywords | Low Temperature, Oxidation, Ultra Thin SiO2 |
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