Paper Title:
Structural and Electrical Characterization of Ultra-Thin SiO2 Films Prepared by Catalytic Oxidation Method
| Periodical |
Solid State Phenomena (Volumes 76 - 77)
|
| Main Theme |
Ultra Clean Processing of Silicon Surfaces V
|
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
157-160 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.157 |
| Citation |
Akira Izumi et al., 2001, Solid State Phenomena, 76-77, 157 |
| Authors |
Akira Izumi, Manabu Kudo, Hideki Matsumura |
| Keywords |
Low Temperature, Oxidation, Ultra Thin SiO2 |
| Price |
US$ 28,- |