Paper Title:
Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements
  Abstract

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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
161-164
DOI
10.4028/www.scientific.net/SSP.76-77.161
Citation
H. Okorn-Schmidt, C. D'Emic, R. Murphy, "Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements", Solid State Phenomena, Vols. 76-77, pp. 161-164, 2001
Online since
January 2001
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Price
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