Paper Title:
Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics
  Abstract

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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
165-168
DOI
10.4028/www.scientific.net/SSP.76-77.165
Citation
J. S. Jeon, B. Ogle, "Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics", Solid State Phenomena, Vols. 76-77, pp. 165-168, 2001
Online since
January 2001
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Price
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