Influence of Cleaning on the Quality of the Bonding Interface in Direct Bonded Silicon Wafers |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces V |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 173-176 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.173 |
| Citation | W.A. Nevin et al., 2001, Solid State Phenomena, 76-77, 173 |
| Authors | W.A. Nevin, D.L. Gay, G. O'Neill |
| Keywords | Impurity Gettering, Silicon Bonding, Si-Si Interface |
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