Paper Title:
Characterization and Production Metrology of Thin Transistor Gate Dielectric Films
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
177-180
DOI
10.4028/www.scientific.net/SSP.76-77.177
Citation
W. Chism, A. C. Diebold, J. Canterbury, C. Richter, "Characterization and Production Metrology of Thin Transistor Gate Dielectric Films", Solid State Phenomena, Vols. 76-77, pp. 177-180, 2001
Online since
January 2001
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Price
$32.00
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