Characterization and Production Metrology of Thin Transistor Gate Dielectric Films |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
177-180 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.177 |
| Citation |
William Chism et al., 2001, Solid State Phenomena, 76-77, 177 |
| Authors |
William Chism, Alain C. Diebold, Jesse Canterbury, Curt Richter |
| Keywords |
Dispersion Models, Ellipsometry, Gate Dielectrics |
| Full Paper |
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