Low Consumption Front End of the Line Cleaning: LC-FEOL |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
199-202 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.199 |
| Citation |
Pascal Besson et al., 2001, Solid State Phenomena, 76-77, 199 |
| Authors |
Pascal Besson, C. Cowache, J.M. Fabbri, F. Tardif, Alessio Beverina |
| Keywords |
Cleaning, Megasonics, Silicon Consumption |
| Full Paper |
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