Paper Title:
New Single Wafer Double Sided Spin Cleaning Method
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
203-206
DOI
10.4028/www.scientific.net/SSP.76-77.203
Citation
W. Starflinger, R. Sellmer, S. Detterbeck, A. Lechner, J. Leberzammer, H.-J. Kruwinus, "New Single Wafer Double Sided Spin Cleaning Method", Solid State Phenomena, Vols. 76-77, pp. 203-206, 2001
Online since
January 2001
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Price
$32.00
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