Paper Title:
Determination of Photoresist Degradation Products in O3/DI Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
207-210
DOI
10.4028/www.scientific.net/SSP.76-77.207
Citation
H. Vankerckhoven, F. De Smedt, B. Van Herp, M. Claes, S. De Gendt, M. M. Heyns, C. Vinckier, "Determination of Photoresist Degradation Products in O3/DI Processing", Solid State Phenomena, Vols. 76-77, pp. 207-210, 2001
Online since
January 2001
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Price
$32.00
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