Paper Title:

The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning

Periodical Solid State Phenomena (Volumes 76 - 77)
Main Theme Ultra Clean Processing of Silicon Surfaces V
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 211-214
DOI 10.4028/
Citation F. De Smedt et al., 2001, Solid State Phenomena, 76-77, 211
Authors F. De Smedt, Stefan De Gendt, Marc M. Heyns, Chris Vinckier
Keywords Decomposition, Kinetic, Ozone, Semiconductor Cleaning, Solubility
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