Paper Title:
The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
211-214
DOI
10.4028/www.scientific.net/SSP.76-77.211
Citation
F. De Smedt, S. De Gendt, M. M. Heyns, C. Vinckier, "The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning", Solid State Phenomena, Vols. 76-77, pp. 211-214, 2001
Online since
January 2001
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Price
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