Paper Title:
The Ozone Solubility and its Decay in Aqueous Solutions: Crucial Issues in Ozonated Chemistries for Semiconductor Cleaning
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76 - 77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
211-214
DOI
10.4028/www.scientific.net/SSP.76-77.211
Citation
F. De Smedt et al., 2001, Solid State Phenomena, 76-77, 211
Price
US$ 28,-
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