Paper Title:
Control of Ozonated Water Cleaning Process for Photoresist Removal
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
215-218
DOI
10.4028/www.scientific.net/SSP.76-77.215
Citation
S. W. Lim, C.E.D. Chidsey, "Control of Ozonated Water Cleaning Process for Photoresist Removal", Solid State Phenomena, Vols. 76-77, pp. 215-218, 2001
Online since
January 2001
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Price
$32.00
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