Paper Title:
A Controlled Deposition of Organic Contamination and the Removal with Ozone Based Cleanings
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
223-226
DOI
10.4028/www.scientific.net/SSP.76-77.223
Citation
M. Claes, S. De Gendt, C. Kenens, T. Conard, H. Bender, W. Storm, T. Bauer, S. Lagrange, P. W. Mertens, M. M. Heyns, "A Controlled Deposition of Organic Contamination and the Removal with Ozone Based Cleanings", Solid State Phenomena, Vols. 76-77, pp. 223-226, 2001
Online since
January 2001
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Price
$32.00
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