Paper Title:
From Piranha to Barracuda: Mechanism of Ozone and Water Vapor Photoresist Strip in a Wet Bench
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
227-230
DOI
10.4028/www.scientific.net/SSP.76-77.227
Citation
T. Riedel, K. Wolke, S. De Gendt, B. Onsia, "From Piranha to Barracuda: Mechanism of Ozone and Water Vapor Photoresist Strip in a Wet Bench", Solid State Phenomena, Vols. 76-77, pp. 227-230, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.