Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
23-26 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.23 |
| Citation |
Angeles Marcia Almanza-Workman et al., 2001, Solid State Phenomena, 76-77, 23 |
| Authors |
Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop |
| Keywords |
Poly-Silicon, Self-Assembled Monolayer (SAM), Stiction, Water Dispersible Silanes |
| Full Paper |
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