Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 23-26 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.23 |
| Authors | Angeles Marcia Almanza-Workman, Srini Raghavan, Pierre Deymier, David J. Monk, Ray Roop |
| Keywords | Polysilicon, Self-Assembled Monolayer (SAM), Stiction, Water Dispersible Silanes |
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