Paper Title:
Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures
  Abstract

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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
23-26
DOI
10.4028/www.scientific.net/SSP.76-77.23
Citation
A. M. Almanza-Workman, S. Raghavan, P. Deymier, D. J. Monk, R. Roop, "Wettability Modification of Polysilicon for Stiction Reduction in Silicon Based Micro-electromechanical Structures", Solid State Phenomena, Vols. 76-77, pp. 23-26, 2001
Online since
January 2001
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Price
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