Paper Title:
Megasonic Silicon Wafer Cleaning and Its Influence on LSI Devices
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
235-240
DOI
10.4028/www.scientific.net/SSP.76-77.235
Citation
A. Tomozawa, A. Ohnishi, H. Kinoshita, T. Nakano, "Megasonic Silicon Wafer Cleaning and Its Influence on LSI Devices", Solid State Phenomena, Vols. 76-77, pp. 235-240, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.