Paper Title:
Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
245-250
DOI
10.4028/www.scientific.net/SSP.76-77.245
Citation
H. Morita, J. ichi Ida, O. Ota, K. Tsukamoto, T. Ohmi, "Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation", Solid State Phenomena, Vols. 76-77, pp. 245-250, 2001
Online since
January 2001
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Price
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