Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
245-250 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.245 |
| Citation |
Hiroshi Morita et al., 2001, Solid State Phenomena, 76-77, 245 |
| Authors |
Hiroshi Morita, Jun ichi Ida, Osamu Ota, Kazumi Tsukamoto, Tadahiro Ohmi |
| Keywords |
Hydrogenated Ultrapure Water (H2-UPW), Particle Removal Mechanism, Surplus Radical Model |
| Full Paper |
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