Paper Title:
Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard
  Abstract

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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
259-262
DOI
10.4028/www.scientific.net/SSP.76-77.259
Citation
S. H. Yoo, B. Y.H. Liu, J. Sun, N. Narayanswami, G. P. Thomes, "Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard", Solid State Phenomena, Vols. 76-77, pp. 259-262, 2001
Online since
January 2001
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Price
$32.00
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