Paper Title:
Use of Surfactants for Improved Particle Performance of dHF-Based Cleaning Recipes
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
263-266
DOI
10.4028/www.scientific.net/SSP.76-77.263
Citation
R. Vos, K. D. Xu, M. Lux, W. Fyen, R. Singh, Z. F. Chen, P. W. Mertens, Z. Hatcher, M. M. Heyns, "Use of Surfactants for Improved Particle Performance of dHF-Based Cleaning Recipes", Solid State Phenomena, Vols. 76-77, pp. 263-266, 2001
Online since
January 2001
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Price
$32.00
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