Paper Title:
Pattern Dependent Corrosion Effects in HF Based Post Cu CMP Cleanings
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
275-278
DOI
10.4028/www.scientific.net/SSP.76-77.275
Citation
W. Fyen, I. Teerlinck, S. Lagrange, S.H. Brongersma, A. Steegen, P. W. Mertens, M. M. Heyns, "Pattern Dependent Corrosion Effects in HF Based Post Cu CMP Cleanings", Solid State Phenomena, Vols. 76-77, pp. 275-278, 2001
Online since
January 2001
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Price
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