Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
279-282 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.279 |
| Citation |
M. Boehringer et al., 2001, Solid State Phenomena, 76-77, 279 |
| Authors |
M. Boehringer, J.E. Pillion, V. Erdmann, M. Rygula, K. Winz, P. Brauchle, D. Aquino, H. Zhang, Joseph Zahka, G. Zielonka, J. Hauber |
| Keywords |
Copper (Cu), Hydrofluoric Acid (HF), Poly-Silicon |
| Full Paper |
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