Paper Title:
SC-1 Clean Improvements for Post STI CMP
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
291-294
DOI
10.4028/www.scientific.net/SSP.76-77.291
Citation
K. McAvey, A. Hoadley, C. Binkerd, "SC-1 Clean Improvements for Post STI CMP", Solid State Phenomena, Vols. 76-77, pp. 291-294, 2001
Online since
January 2001
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Price
$32.00
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