Paper Title:
Silicon Surface Cleaning after Spacer Dry Etching
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
303-306
DOI
10.4028/www.scientific.net/SSP.76-77.303
Citation
D. Shamiryan, M. R. Baklanov, S. Vanhaelemeersch, "Silicon Surface Cleaning after Spacer Dry Etching", Solid State Phenomena, Vols. 76-77, pp. 303-306, 2001
Online since
January 2001
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Price
$32.00
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