Paper Title:
New Aqueous Clean for Aluminum Interconnects: Part I. Fundamentals
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
31-34
DOI
10.4028/www.scientific.net/SSP.76-77.31
Citation
D.L. Rath, R. Ravikumar, D.J. Delehanty, R.G. Filippi, E.W. Kiewra, G. Stojakovic, K.J. McCullough, D.D. Miura, B.N. Rhoads, "New Aqueous Clean for Aluminum Interconnects: Part I. Fundamentals", Solid State Phenomena, Vols. 76-77, pp. 31-34, 2001
Online since
January 2001
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Price
$32.00
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