Paper Title:
Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
311-0
DOI
10.4028/www.scientific.net/SSP.76-77.311
Citation
S. Verhaverbeke, J. C.-H. Shao, L. Liu, "Wet Cleaning of Trenches and Vias after Oxide/Nitride Dry Etch with Cu Exposed", Solid State Phenomena, Vols. 76-77, pp. 311-0, 2001
Online since
January 2001
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Price
$32.00
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