Materials Science & Technology

FULLTEXT SEARCH
NEW: Advanced Search

Metal Wet Cleaning with No Corrosion: A Novel Approach

Journal Solid State Phenomena (Volumes 76 - 77)
Volume Ultra Clean Processing of Silicon Surfaces
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 35-38
DOI 10.4028/www.scientific.net/SSP.76-77.35
Authors Francesco Pipia, Geun Min Choi, Tadahiro Ohmi
Keywords Etch Rate, Metal, Particle Removal, Wet Cleaning
Full Paper PDF Get the full paper by clicking here

First page example