Paper Title:
Non-Contact Post Cu CMP Cleaning Using Megasonic Energy
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
39-42
DOI
10.4028/www.scientific.net/SSP.76-77.39
Citation
W. Fyen, J. M. Lauerhaas, I. Vos, M. Meuris, P. W. Mertens, M. M. Heyns, "Non-Contact Post Cu CMP Cleaning Using Megasonic Energy", Solid State Phenomena, Vols. 76-77, pp. 39-42, 2001
Online since
January 2001
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Price
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