Non-Contact Post Cu CMP Cleaning Using Megasonic Energy |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
39-42 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.39 |
| Citation |
Wim Fyen et al., 2001, Solid State Phenomena, 76-77, 39 |
| Authors |
Wim Fyen, Jeffrey M. Lauerhaas, Ingrid Vos, Marc Meuris, Paul W. Mertens, Marc M. Heyns |
| Keywords |
Cu, Megasonics, Post Cu CMP Cleaning |
| Full Paper |
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