Non-Contact Post Cu CMP Cleaning Using Megasonic Energy |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 39-42 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.39 |
| Authors | Wim Fyen, Jeffrey M. Lauerhaas, Ingrid Vos, Marc Meuris, Paul W. Mertens, Marc M. Heyns |
| Keywords | Cu, Megasonics, Post Cu CMP Cleaning |
| Full Paper | 
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