Improved Phosphoric Acid Mixtures for Nitride Strip |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
43-46 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.43 |
| Citation |
Rita Vos et al., 2001, Solid State Phenomena, 76-77, 43 |
| Authors |
Rita Vos, Marcel Lux, Thierry Conard, H. De Witte, Paul W. Mertens, Marc M. Heyns, Z. Hatcher |
| Keywords |
Nitride Etch Selectivity, Oxide Etch Selectivity, Particle Removal, Wafer Cleaning |
| Full Paper |
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