Paper Title:
Improved Phosphoric Acid Mixtures for Nitride Strip
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
43-46
DOI
10.4028/www.scientific.net/SSP.76-77.43
Citation
R. Vos, M. Lux, T. Conard, H. De Witte, P. W. Mertens, M. M. Heyns, Z. Hatcher, "Improved Phosphoric Acid Mixtures for Nitride Strip", Solid State Phenomena, Vols. 76-77, pp. 43-46, 2001
Online since
January 2001
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Price
$35.00
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