Synchronous Schlieren Image Analysis of Megasonic Single Wafer Cleaning |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
55-58 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.55 |
| Citation |
Takashi Azuma et al., 2001, Solid State Phenomena, 76-77, 55 |
| Authors |
Takashi Azuma, Akihiro Tomozawa, Hideo Kinoshita, Shin-ichiro Umemura |
| Keywords |
Lamb Wave, Megasonics, Schlieren Method |
| Full Paper |
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