Paper Title:

Synchronous Schlieren Image Analysis of Megasonic Single Wafer Cleaning

Periodical Solid State Phenomena (Volumes 76 - 77)
Main Theme Ultra Clean Processing of Silicon Surfaces V
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 55-58
DOI 10.4028/www.scientific.net/SSP.76-77.55
Citation Takashi Azuma et al., 2001, Solid State Phenomena, 76-77, 55
Authors Takashi Azuma, Akihiro Tomozawa, Hideo Kinoshita, Shin-ichiro Umemura
Keywords Lamb Wave, Megasonics, Schlieren Method
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