Paper Title:
Synchronous Schlieren Image Analysis of Megasonic Single Wafer Cleaning
| Periodical |
Solid State Phenomena (Volumes 76 - 77)
|
| Main Theme |
Ultra Clean Processing of Silicon Surfaces V
|
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
55-58 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.55 |
| Citation |
Takashi Azuma et al., 2001, Solid State Phenomena, 76-77, 55 |
| Authors |
Takashi Azuma, Akihiro Tomozawa, Hideo Kinoshita, Shin-ichiro Umemura |
| Keywords |
Lamb Wave, Megasonics, Schlieren Method |
| Price |
US$ 28,- |