Paper Title:
Dry Cleaning of Organic Contamination on Silicon Wafers Using Rapid Optical Surface Treatment
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
59-62
DOI
10.4028/www.scientific.net/SSP.76-77.59
Citation
A. Danel, N. Rochat, M. Olivier, A. Roche, F. Tardif, "Dry Cleaning of Organic Contamination on Silicon Wafers Using Rapid Optical Surface Treatment", Solid State Phenomena, Vols. 76-77, pp. 59-62, 2001
Online since
January 2001
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Price
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