Paper Title:
Materials Compatibility and Organic Build-Up during Ozone-Based Cleaning of Semiconductor Devices
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
63-66
DOI
10.4028/www.scientific.net/SSP.76-77.63
Citation
F. De Smedt, S. De Gendt, M. M. Heyns, C. Vinckier, "Materials Compatibility and Organic Build-Up during Ozone-Based Cleaning of Semiconductor Devices", Solid State Phenomena, Vols. 76-77, pp. 63-66, 2001
Online since
January 2001
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.