Paper Title:
Surface Characterization after Different Wet Chemical Cleans
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
67-70
DOI
10.4028/www.scientific.net/SSP.76-77.67
Citation
M. Claes, E. Röhr, T. Conard, F. De Smedt, S. De Gendt, W. Storm, T. Bauer, P. W. Mertens, M. M. Heyns, "Surface Characterization after Different Wet Chemical Cleans", Solid State Phenomena, Vols. 76-77, pp. 67-70, 2001
Online since
January 2001
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Price
$32.00
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