The Effect of Ion Implantation on the Metal Contamination of Silicon Surfaces in Aqueous Solution |
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| Journal | Solid State Phenomena (Volumes 76 - 77) |
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| Volume | Ultra Clean Processing of Silicon Surfaces |
| Edited by | Marc Heyns, Marc Meuris and Paul Mertens |
| Pages | 7-8 |
| DOI | 10.4028/www.scientific.net/SSP.76-77.7 |
| Authors | Lee M. Loewenstein, Paul W. Mertens, Marc M. Heyns |
| Full Paper | 
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