Paper Title:

A Hydrogenated Water Application to Semiconductor Manufacturing

Periodical Solid State Phenomena (Volumes 76 - 77)
Main Theme Ultra Clean Processing of Silicon Surfaces V
Edited by Marc Heyns, Marc Meuris and Paul Mertens
Pages 71-74
DOI 10.4028/www.scientific.net/SSP.76-77.71
Citation Ikunori Yokoi et al., 2001, Solid State Phenomena, 76-77, 71
Authors Ikunori Yokoi, Geun Min Choi, Yoshio Yamazaki, Tadahiro Ohmi
Keywords Copper (Cu), Hydrogenated Ultrapure Water (H2-UPW), Oxidation, Oxidation-Reduction Potential (ORP)
Price US$ 28,-
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