Electrochemical Study for the Characterization of Wet Silicon Oxide Surfaces |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
81-84 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.81 |
| Citation |
V. Bertagna et al., 2001, Solid State Phenomena, 76-77, 81 |
| Authors |
V. Bertagna, R. Erre, F. Rouelle, M. Chemla, Sébastien Petitdidier, Didier Lévy |
| Keywords |
Impedance, Oxide, Silicon |
| Full Paper |
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