Paper Title:
Pre-Diffusion Cleaning Using Ozone and HF
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
85-88
DOI
10.4028/www.scientific.net/SSP.76-77.85
Citation
E. J. Bergman, S. Lagrange, M. Claes, S. De Gendt, E. Röhr, "Pre-Diffusion Cleaning Using Ozone and HF", Solid State Phenomena, Vols. 76-77, pp. 85-88, 2001
Online since
January 2001
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Price
$35.00
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