Paper Title:
Novel Back Side Processes for Copper and Pre-Lithography Cleans
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
89-92
DOI
10.4028/www.scientific.net/SSP.76-77.89
Citation
B. Aegerter, S. Lagrange, C. Dundas, P. Van Doorne, "Novel Back Side Processes for Copper and Pre-Lithography Cleans", Solid State Phenomena, Vols. 76-77, pp. 89-92, 2001
Online since
January 2001
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Price
$32.00
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