Barium, Strontium and Bismuth Contamination in CMOS Processes |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
9-14 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.9 |
| Authors |
H. Boubekeur,
T. Mikolajick,
J. Höpfner,
C. Dehm,
W. Pamler,
J. Steiner,
G. Kilian,
Bernd O. Kolbesen,
Anton J. Bauer,
Lothar Frey,
Heiner Ryssel
|
| Keywords |
FeRAM, High-K DRAMs, Metal Contamination |
| Full Paper |
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