Barium, Strontium and Bismuth Contamination in CMOS Processes |
| Journal |
Solid State Phenomena (Volumes 76 - 77) |
| Volume |
Ultra Clean Processing of Silicon Surfaces V |
| Edited by |
Marc Heyns, Marc Meuris and Paul Mertens |
| Pages |
9-14 |
| DOI |
10.4028/www.scientific.net/SSP.76-77.9 |
| Citation |
H. Boubekeur et al., 2001, Solid State Phenomena, 76-77, 9 |
| Authors |
H. Boubekeur, T. Mikolajick, J. Höpfner, C. Dehm, W. Pamler, J. Steiner, G. Kilian, Bernd O. Kolbesen, Anton J. Bauer, Lothar Frey, Heiner Ryssel |
| Keywords |
FeRAM, High-K DRAMs, Metal Contamination |
| Full Paper |
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