Paper Title:
Optimisations of SC-1 Conditions for Sub 0.18μm Technologies in an Industrial Environment
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Periodical
Solid State Phenomena (Volumes 76-77)
Edited by
Marc Heyns, Marc Meuris and Paul Mertens
Pages
93-96
DOI
10.4028/www.scientific.net/SSP.76-77.93
Citation
S. Petitdidier, H. Bernard, E. Bellandi, F. Landa, H. Shirakawa, D. Lévy, "Optimisations of SC-1 Conditions for Sub 0.18μm Technologies in an Industrial Environment", Solid State Phenomena, Vols. 76-77, pp. 93-96, 2001
Online since
January 2001
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Price
$32.00
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