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Beam Injection Assessment of Microstructures in Semiconductors

Volumes 78 - 79
doi: 10.4028/www.scientific.net/SSP.78-79
Paper Titles published in this Main Theme:
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Impurity Concentration Mapping in Mulitcrystalline Silicon Wafers

Authors: Santo Martinuzzi, Olivier Palais

3

Single Contact Beam Induced Current Phenomena - A Review

Authors: Daniel S.H. Chan, Jacob C.H. Phang, J.M. Chin, S. Kolachina

11

Challenging the Spatial Resolution Limits of CL and EBIC

Authors: Carl E. Norman

19

EBIC Investigation of a 3-Dimensional Network of Inversion Channels in Solar Cells on Silicon Ribbons

Authors: Otwin Breitenstein, M. Langenkamp, J.P. Rakotoniaina

29

Electrical Behaviour of Crystal Defects in Silicon Solar Cells

Authors: Martin Kittler, Winfried Seifert, O. Krüger

39

LBIC Control Mapping of Textured Silicon Thin Film Obtained by Liquid Phase Epitaxy on Transferable Silicon Grid

Authors: A. Fave, J.P. Boyeaux, Mustapha Lemiti, A. Laugier, P. Kleimann, Jan Linnros

49

Beam Injection Studies of Dislocations and Oxygen Precipitates in Semiconductor Silicon

Authors: Sergio Pizzini, Simona Binetti, Alessia Le Donne, E. Leoni, Maurizio Acciarri, Giancarlo Salviati, L. Lazzarini

57

Depth Profiling of the Recombination Activity of Defects Measured by Temperature-Dependent Cross-Sectional EBIC

Authors: O.F. Vyvenko, O. Krüger, Martin Kittler

65

Simulation of EBIC Contrast for Extended Defects Inclined to the Surface

Authors: V.V. Sirotkin, Eugene B. Yakimov

73

Reconstruction of Diffusion Length Distribution by the Modulated EBIC and OBIC

Authors: Eugene B. Yakimov

79

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