Single Contact Beam Induced Current Phenomena - A Review |
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| Journal | Solid State Phenomena (Volumes 78 - 79) |
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| Volume | Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by | H. Tomokage and T. Sekiguchi |
| Pages | 11-18 |
| DOI | 10.4028/www.scientific.net/SSP.78-79.11 |
| Citation | Daniel S.H. Chan et al., 2001, Solid State Phenomena, 78-79, 11 |
| Authors | Daniel S.H. Chan, Jacob C.H. Phang, J.M. Chin, S. Kolachina |
| Keywords | Integrated Circuit Failure Analysis, Single Contact Electron Beam Induced Currents, Single Contact Optical Induced Currents |
| Full Paper | 
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