Paper Title:
Cathodoluminescence Depth Profiling of Ge-Implanted SiO2 Layers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
119-126
DOI
10.4028/www.scientific.net/SSP.78-79.119
Citation
H. J. Fitting, T. Barfels, B. Schmidt, A. von Czarnowski, "Cathodoluminescence Depth Profiling of Ge-Implanted SiO2 Layers", Solid State Phenomena, Vols. 78-79, pp. 119-126, 2001
Online since
April 2001
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Price
$32.00
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