Paper Title:
Surface Characterization of Plasma Etched DLC Films by Scanning Tunneling Microscopy and Atomic Force Microscopy
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
183-190
DOI
10.4028/www.scientific.net/SSP.78-79.183
Citation
E.R. Hwang, W. Choi, Y. Iseri, H. Tomokage, "Surface Characterization of Plasma Etched DLC Films by Scanning Tunneling Microscopy and Atomic Force Microscopy", Solid State Phenomena, Vols. 78-79, pp. 183-190, 2001
Online since
April 2001
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