Challenging the Spatial Resolution Limits of CL and EBIC |
|
| Journal | Solid State Phenomena (Volumes 78 - 79) |
|---|---|
| Volume | Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by | H. Tomokage and T. Sekiguchi |
| Pages | 19-28 |
| DOI | 10.4028/www.scientific.net/SSP.78-79.19 |
| Citation | Carl E. Norman, 2001, Solid State Phenomena, 78-79, 19 |
| Authors | Carl E. Norman |
| Keywords | Cathodoluminescence, CL, EBIC, Electron Beam Induced Current (EBIC), Scanning Electron Microscope (SEM), Spatial Resolution |
| Full Paper | 
Get the full paper by clicking here
|
First page example
