Paper Title:
Electron Beam Induced Current Contrast of Oxygen Precipitation Related Defects in Czochralski Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
237-252
DOI
10.4028/www.scientific.net/SSP.78-79.237
Citation
T. Ono, T. Sasaki, H. Kirk, G. A. Rozgonyi, "Electron Beam Induced Current Contrast of Oxygen Precipitation Related Defects in Czochralski Silicon", Solid State Phenomena, Vols. 78-79, pp. 237-252, 2001
Online since
April 2001
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