Paper Title:
Rapid Diffusion of Titanium along Grain Boundaries in Polysilicon during Electron Beam Evaporation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
281-288
DOI
10.4028/www.scientific.net/SSP.78-79.281
Citation
K. Yokota, T. Kobayashi, K. Nakamura, "Rapid Diffusion of Titanium along Grain Boundaries in Polysilicon during Electron Beam Evaporation", Solid State Phenomena, Vols. 78-79, pp. 281-288, 2001
Online since
April 2001
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Price
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