Impurity Concentration Mapping in Mulitcrystalline Silicon Wafers |
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| Journal | Solid State Phenomena (Volumes 78 - 79) |
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| Volume | Beam Injection Assessment of Microstructures in Semiconductors |
| Edited by | H. Tomokage and T. Sekiguchi |
| Pages | 3-10 |
| DOI | 10.4028/www.scientific.net/SSP.78-79.3 |
| Citation | Santo Martinuzzi et al., 2001, Solid State Phenomena, 78-79, 3 |
| Authors | Santo Martinuzzi, Olivier Palais |
| Keywords | Defect Impurity Interaction, Diffusion Length, Gold, Iron, Lifetime |
| Full Paper | 
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