Paper Title:
Dose Rate Dependence of Ion-Induced-Damage in Si Evaluated by Spectroscopic Ellipsometry
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
341-344
DOI
10.4028/www.scientific.net/SSP.78-79.341
Citation
Y. Murakami, H. Yamauchi, T. Sadoh, A. Kenjo, M. Miyao, "Dose Rate Dependence of Ion-Induced-Damage in Si Evaluated by Spectroscopic Ellipsometry", Solid State Phenomena, Vols. 78-79, pp. 341-344, 2001
Online since
April 2001
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