Paper Title:
Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO2
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
345-348
DOI
10.4028/www.scientific.net/SSP.78-79.345
Citation
I. Tsunoda, T. Nagata, T. Sadoh, A. Kenjo, M. Miyao, "Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO2", Solid State Phenomena, Vols. 78-79, pp. 345-348, 2001
Online since
April 2001
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