Paper Title:
Development of an Ultra-Precision Positioner and its Applications
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 78-79)
Edited by
H. Tomokage and T. Sekiguchi
Pages
413-418
DOI
10.4028/www.scientific.net/SSP.78-79.413
Citation
Y. Egashira, K. Kosaka, S. Takada, T. Iwabuchi, M. Shibata, K. Nagamoto, H. Kubota, "Development of an Ultra-Precision Positioner and its Applications", Solid State Phenomena, Vols. 78-79, pp. 413-418, 2001
Online since
April 2001
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Price
$32.00
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